I could not resist

Photoresists are one of the essential ingredients for chip manufacturing and micro/nano engineering. We will show how we’re using them in a DIY Electron Beam Lithography set-up and how you’re able to cook your own cheap resists and mix your own developers.

Resists? What's that?

<span></span><span class="err">What are their applications</span>
<span class="err">How does it work (types (positive/negative), chemistry, proximity effect, dosage etc)</span>

EBL? What's that?

<span></span><span class="err">How does it work</span>
<span class="err">Pros &amp; cons:  comparison between EBL (slow) photolithography (fast)</span>
<span class="err">Which resist can I use for EBL</span>

DIY cooking of PMMA based resists

<span></span><span class="err">Comparison of different solvents</span>

Composition of different developers

<span></span><span class="err">Comparison of different developers</span>

Applications

<span></span><span class="err">Usage as a mask</span>
<span class="err">Usage as a structural dielectric material</span>
<span class="err"> ...(?)</span>

The EBL exposure process

<span></span><span class="err">simple SEM retrofitted with an EBL controller</span>
<span class="err">The common file formats (GDSII &amp; OASIS)</span>
<span class="c">Scan-Gen: how to generate the proper curves for the exposure</span>
<span class="c">Hardware: off-the-shelf embedded modules like the RedPitaya</span>
<span class="err">Generation of different filling curve styles, calibration, compensation of the proximity effect, correction of the SEMs intrinsic parameters, dosage!</span>
<span class="err">Fiducial detection and alignment for multi-pass/multi-layer processes</span>

Stuff comes together

<span></span><span class="err">walk through the complete process along a simple example</span>

More Examples

Thanks & Credits

Q & A